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Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution
Chen-Tai Tan, 譚振台, Yuan-Sheng Chan, 詹遠生, Jhao-An Chen, 陳昭安, Teh-Chao Liao, 廖得照, Ming-Hung Chiu, 邱銘宏Volume:
9
Year:
2011
Language:
english
Pages:
3
Journal:
col/9/10/col-9-10-101202.pdf
DOI:
10.3788/COL201109.101202
File:
PDF, 1.02 MB
english, 2011