Effect of Anneal Time on the Enhanced Performance of a-Si:H...

Effect of Anneal Time on the Enhanced Performance of a-Si:H TFTs for Future Display Technology

Indluru, A., Venugopal, S.M., Allee, D.R., Alford, T.L.
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Volume:
7
Year:
2011
Language:
english
Pages:
5
Journal:
jdt/7/6/jdt-7-6-306.pdf
DOI:
10.1109/JDT.2010.2063695
File:
PDF, 817 KB
english, 2011
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