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A surface micromachined optical scanner array using photoresist lenses fabricated by a thermal reflow process
Toshiyoshi, H., Su, G.-D.J., LaCosse, J., Wu, M.C.Volume:
21
Year:
2003
Language:
english
Pages:
9
Journal:
jlt/21/7/jlt-21-7-1700.pdf
DOI:
10.1109/JLT.2003.814399
File:
PDF, 996 KB
english, 2003