Dry-etched silicon-on-insulator waveguides with low...

Journal of Lightwave Technology 2005 Vol. 23; Iss. 11

Dry-etched silicon-on-insulator waveguides with low propagation and fiber-coupling losses

Solehmainen, K., Aalto, T., Dekker, J., Kapulainen, M., Harjanne, M., Kukli, K., Heimala, P., Kolari, K., Leskela, M.
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Volume:
23
Year:
2005
Language:
english
Pages:
6
Journal:
jlt/23/11/jlt-23-11-3875.pdf
DOI:
10.1109/JLT.2005.857750
File:
PDF, 226 KB
english, 2005
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