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Correlation study between VAD preform deposition surface and Germanium doping profiles
dos Santos, J.S., Ono, E., Gusken, E., Suzuki, C.K.Volume:
24
Year:
2006
Language:
english
Pages:
7
Journal:
jlt/24/2/jlt-24-2-831.pdf
DOI:
10.1109/JLT.2005.861936
File:
PDF, 233 KB
english, 2006