Bulk-micromachined optical filter based on guided-mode...

Journal of Lightwave Technology 2006 Vol. 24; Iss. 4

Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane

Che-Lung Hsu, Yung-Chih Liu, Chih-Ming Wang, Mount-Learn Wu, Ya-Lun Tsai, Yue-Hong Chou, Chien-Chieh Lee, Jenq-Yang Chang
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Volume:
24
Year:
2006
Language:
english
Pages:
7
Journal:
jlt/24/4/jlt-24-4-1922.pdf
DOI:
10.1109/JLT.2006.871117
File:
PDF, 263 KB
english, 2006
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