Low-Actuation-Voltage MEMS for 2-D Optical Switches
Hsin-Ta Hsieh, Chen-Wei Chiu, Tsao, T., Fukang Jiang, Su, G.-D.J.Volume:
24
Year:
2006
Language:
english
Pages:
8
Journal:
jlt/24/11/jlt-24-11-4372.pdf
DOI:
10.1109/JLT.2006.883674
File:
PDF, 909 KB
english, 2006