Ellipsometry measurement of the complex refractive index...

Journal of the Optical Society of America A 1990 Vol. 7; Iss. 2

Ellipsometry measurement of the complex refractive index and thickness of polysilicon thin films

Ho, Jau Hwang, Len Lee, Chung, Lei, Tan Fu, Chao, Tien Sheng
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Volume:
7
Year:
1990
Language:
english
Journal:
josaa/7/2/josaa-7-2-196.pdf
DOI:
10.1364/JOSAA.7.000196
File:
PDF, 1006 KB
english, 1990
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