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Modeling optical microscope images of integrated-circuit structures
Yuan, Chi-Min, Strojwas, Andrzej J.Volume:
8
Year:
1991
Language:
english
Journal:
josaa/8/5/josaa-8-5-778.pdf
DOI:
10.1364/JOSAA.8.000778
File:
PDF, 1.15 MB
english, 1991