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Polynomial solution for two thicknesses of a multilayer system from a single ellipsometric measurement
Russev, Stoyan C., Mircheva, Iliana, Drolet, Jean-Pierre, Ducharme, Daniel, Leblanc, Roger M.Volume:
13
Year:
1996
Language:
english
Journal:
josaa/13/1/josaa-13-1-152.pdf
DOI:
10.1364/JOSAA.13.000152
File:
PDF, 420 KB
english, 1996