![](/img/cover-not-exists.png)
Modal characteristics of short-pitch photoresist gratings exhibiting zero-order diffraction anomalies
Coulombe, Stephen A., McNeil, John R.Volume:
16
Year:
1999
Language:
english
Journal:
josaa/16/12/josaa-16-12-2904.pdf
DOI:
10.1364/JOSAA.16.002904
File:
PDF, 1.33 MB
english, 1999