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Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films
Chang, Yia-Chung, Li, Guangwei, Chu, Hanyou, Opsal, JonVolume:
23
Year:
2006
Language:
english
Journal:
josaa/23/3/josaa-23-3-638.pdf
DOI:
10.1364/JOSAA.23.000638
File:
PDF, 171 KB
english, 2006