A new MEMS-based system for ultra-high-resolution imaging...

A new MEMS-based system for ultra-high-resolution imaging at elevated temperatures

Lawrence F. Allard, Wilbur C. Bigelow, Miguel Jose-Yacaman, David P. Nackashi, John Damiano, Stephen E. Mick
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Volume:
72
Year:
2009
Language:
english
Pages:
8
DOI:
10.1002/jemt.20673
File:
PDF, 499 KB
english, 2009
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