A new MEMS-based system for ultra-high-resolution imaging at elevated temperatures
Lawrence F. Allard, Wilbur C. Bigelow, Miguel Jose-Yacaman, David P. Nackashi, John Damiano, Stephen E. MickVolume:
72
Year:
2009
Language:
english
Pages:
8
DOI:
10.1002/jemt.20673
File:
PDF, 499 KB
english, 2009