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Multimode interferometric sensors on silicon optimized for fully integrated complementary-metal-oxide-semiconductor chemical-biological sensor systems
Lillie, Jeffrey J., Thomas, Mikkel A., Jokerst, Nan-Marie, Ralph, Stephen E., Dennis, Karla A., Henderson, Clifford L.Volume:
23
Year:
2006
Language:
english
Journal:
josab/23/4/josab-23-4-642.pdf
DOI:
10.1364/JOSAB.23.000642
File:
PDF, 252 KB
english, 2006