Refractive index, free carrier concentration, and mobility depth profiles of ion implanted Si: optical investigation using FTIR spectroscopy
Katsidis, Charalambos C.Volume:
25
Year:
2008
Language:
english
Journal:
josab/25/5/josab-25-5-854.pdf
DOI:
10.1364/JOSAB.25.000854
File:
PDF, 966 KB
english, 2008