Analysis of extreme ultraviolet microscopy images of...

Journal of the Optical Society of America B 2008 Vol. 25; Iss. 7

Analysis of extreme ultraviolet microscopy images of patterned nanostructures based on a correlation method

Wachulak, P. W., Brewer, C. A., Brizuela, F., Menoni, C. S., Chao, W., Anderson, E. H., Bartels, R. A., Rocca, J. J., Marconi, M. C.
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Volume:
25
Year:
2008
Language:
english
Pages:
1
Journal:
josab/25/7/josab-25-7-B20.pdf
DOI:
10.1364/JOSAB.25.000B20
File:
PDF, 543 KB
english, 2008
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