Measuring the roughness of high-precision quartz substrates...

Journal of Optical Technology 2002 Vol. 69; Iss. 2

Measuring the roughness of high-precision quartz substrates and laser mirrors by angle-resolved scattering

Azarova, V. V., Dmitriev, V. G., Lokhov, Yu. N., Malitskii, K. N.
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Volume:
69
Year:
2002
Language:
english
Journal:
jot/69/2/jot-69-2-125.pdf
DOI:
10.1364/JOT.69.000125
File:
PDF, 118 KB
english, 2002
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