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Detecting a disturbed layer on a silicon surface by means of monochromatic null ellipsometry
Ayupov, B. M., Kozlova, N. A.Volume:
73
Year:
2006
Language:
english
Journal:
jot/73/3/jot-73-3-212.pdf
DOI:
10.1364/JOT.73.000212
File:
PDF, 133 KB
english, 2006