Holographic photolithography based on thin films of a glassy chalcogenide semiconductor
Koreshev, S. N., Belykh, A. V., Ratushnyĭ, V. P.Volume:
74
Year:
2007
Language:
english
Journal:
jot/74/7/jot-74-7-504.pdf
DOI:
10.1364/JOT.74.000504
File:
PDF, 409 KB
english, 2007