Thickness uniformity of films deposited on rotating substrates
Kotlikov, E. N., Prokashev, V. N., Ivanov, V. A., Tropin, A. N.Volume:
76
Year:
2009
Language:
english
Journal:
jot/76/2/jot-76-2-100.pdf
DOI:
10.1364/JOT.76.000100
File:
PDF, 400 KB
english, 2009