Study of how the angles of incidence of the rays of actinic...

Study of how the angles of incidence of the rays of actinic radiation on the surface of a photomask affect the angular errors of dials fabricated by lift-off photolithography

Kruchinin, D. Yu.
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Volume:
77
Year:
2010
Language:
english
Journal:
jot/77/6/jot-77-6-387.pdf
DOI:
10.1364/JOT.77.000387
File:
PDF, 84 KB
english, 2010
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