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Fabrication of high-aspect ratio, micro-fluidic channels and tunnels using femtosecond laser pulses and chemical etching
Bellouard, Yves, Said, Ali, Dugan, Mark, Bado, PhilippeVolume:
12
Year:
2004
Language:
english
Journal:
oe/12/10/oe-12-10-2120.pdf
DOI:
10.1364/OPEX.12.002120
File:
PDF, 1.40 MB
english, 2004