Through-focus technique for nano-scale grating pitch and...

Optics Express 2005 Vol. 13; Iss. 18

Through-focus technique for nano-scale grating pitch and linewidth analysis

Ku, Yi-Sha, Liu, An-Shun, Smith, Nigel
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Volume:
13
Year:
2005
Language:
english
Journal:
oe/13/18/oe-13-18-6699.pdf
DOI:
10.1364/OPEX.13.006699
File:
PDF, 485 KB
english, 2005
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