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Mathematical model of spin-coated photoresist on a spherical substrate
Feng, Xiao-guo, Sun, Lian-chunVolume:
13
Year:
2005
Language:
english
Journal:
oe/13/18/oe-13-18-7070.pdf
DOI:
10.1364/OPEX.13.007070
File:
PDF, 91 KB
english, 2005