Sub-micron grating fabrication on hafnium oxide thin-film...

Optics Express 2006 Vol. 14; Iss. 4

Sub-micron grating fabrication on hafnium oxide thin-film waveguides with focused ion-beam milling

Chaganti, Kalyani, Salakhutdinov, Ildar, Avrutsky, Ivan, Auner, Gregory, Mansfield, John
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Volume:
14
Year:
2006
Language:
english
Journal:
oe/14/4/oe-14-4-1505.pdf
DOI:
10.1364/OE.14.001505
File:
PDF, 829 KB
english, 2006
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