Low loss silicon on insulator photonic crystal waveguides...

Optics Express 2006 Vol. 14; Iss. 6

Low loss silicon on insulator photonic crystal waveguides made by 193nm optical lithography

Settle, Michael, Salib, Mike, Michaeli, Albert, Krauss, Thomas F.
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Volume:
14
Year:
2006
Language:
english
Journal:
oe/14/6/oe-14-6-2440.pdf
DOI:
10.1364/OE.14.002440
File:
PDF, 711 KB
english, 2006
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