Diffraction-limited performance of flat-substrate...

Optics Express 2006 Vol. 14; Iss. 25

Diffraction-limited performance of flat-substrate reflective imaging gratings patterned by DUV photolithography

Greiner, Christoph M., Iazikov, D., Mossberg, T. W.
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Volume:
14
Year:
2006
Language:
english
Journal:
oe/14/25/oe-14-25-11952.pdf
DOI:
10.1364/OE.14.011952
File:
PDF, 1.29 MB
english, 2006
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