Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography
Wachulak, P. W., Capeluto, M. G., Marconi, M. C., Menoni, C. S., Rocca, J. J.Volume:
15
Year:
2007
Language:
english
Journal:
oe/15/6/oe-15-6-3465.pdf
DOI:
10.1364/OE.15.003465
File:
PDF, 795 KB
english, 2007