A compact system for simultaneous measurement of linear and angular displacements of nano-stages
Kim, Jae-Wan, Kang, Chu-Shik, Kim, Jong-Ahn, Eom, Taebong, Cho, Mijung, Kong, Hong JinVolume:
15
Year:
2007
Language:
english
Journal:
oe/15/24/oe-15-24-15759.pdf
DOI:
10.1364/OE.15.015759
File:
PDF, 294 KB
english, 2007