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Distortion of 3D SU8 photonic structures fabricated by four-beam holographic lithography withumbrella configuration
Zhu, Xuelian, Xu, Yongan, Yang, ShuVolume:
15
Year:
2007
Language:
english
Journal:
oe/15/25/oe-15-25-16546.pdf
DOI:
10.1364/OE.15.016546
File:
PDF, 870 KB
english, 2007