Deep microstructure topography characterization with...

Optics Express 2008 Vol. 16; Iss. 23

Deep microstructure topography characterization with optical vortex interferometer

Masajada, Jan, Leniec, Monika, Jankowska, Elzbieta, Thienpont, Hugo, Ottevaere, Heidi, Gomez, Virginia
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Volume:
16
Year:
2008
Language:
english
Journal:
oe/16/23/oe-16-23-19179.pdf
DOI:
10.1364/OE.16.019179
File:
PDF, 1.37 MB
english, 2008
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