Two step process for the fabrication of diffraction...

Two step process for the fabrication of diffraction limited concave microlens arrays

Ruffieux, Patrick, Scharf, Toralf, Philipoussis, Irène, Herzig, Hans Peter, Voelkel, Reinhard, Weible, Kenneth J.
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Volume:
16
Year:
2008
Language:
english
Journal:
oe/16/24/oe-16-24-19541.pdf
DOI:
10.1364/OE.16.019541
File:
PDF, 1.13 MB
english, 2008
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