Two step process for the fabrication of diffraction limited concave microlens arrays
Ruffieux, Patrick, Scharf, Toralf, Philipoussis, Irène, Herzig, Hans Peter, Voelkel, Reinhard, Weible, Kenneth J.Volume:
16
Year:
2008
Language:
english
Journal:
oe/16/24/oe-16-24-19541.pdf
DOI:
10.1364/OE.16.019541
File:
PDF, 1.13 MB
english, 2008