Optical MEMS pressure sensor based on a mesa-diaphragm structure
Ge, Yixian, Wang, Ming, Yan, HaitaoVolume:
16
Year:
2008
Language:
english
Journal:
oe/16/26/oe-16-26-21746.pdf
DOI:
10.1364/OE.16.021746
File:
PDF, 636 KB
english, 2008