Fabrication of spherical microlenses by a combination of...

Optics Express 2009 Vol. 17; Iss. 8

Fabrication of spherical microlenses by a combination of isotropic wet etching of silicon and molding techniques

Albero, Jorge, Nieradko, Lukasz, Gorecki, Christophe, Ottevaere, Heidi, Gomez, Virginia, Thienpont, Hugo, Pietarinen, Juha, Päivänranta, Birgit, Passilly, Nicolas
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Volume:
17
Year:
2009
Language:
english
Journal:
oe/17/8/oe-17-8-6283.pdf
DOI:
10.1364/OE.17.006283
File:
PDF, 1.22 MB
english, 2009
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