Study of the new ellipsometric measurement method using...

Optics Express 2009 Vol. 17; Iss. 10

Study of the new ellipsometric measurement method using integrated analyzer in parallel mode

Mao, Peng-Hui, Zheng, Yu-Xiang, Chen, Yue-Rui, Cai, Qing-Yuan, Zhang, Rong-Jun, Chen, Liang-Yao
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Volume:
17
Year:
2009
Language:
english
Journal:
oe/17/10/oe-17-10-8641.pdf
DOI:
10.1364/OE.17.008641
File:
PDF, 342 KB
english, 2009
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