Shape control of microchannels fabricated in fused silica by femtosecond laser irradiation and chemical etching
Vishnubhatla, Krishna Chaitanya, Bellini, Nicola, Ramponi, Roberta, Cerullo, Giulio, Osellame, RobertoVolume:
17
Year:
2009
Language:
english
Journal:
oe/17/10/oe-17-10-8685.pdf
DOI:
10.1364/OE.17.008685
File:
PDF, 1022 KB
english, 2009