White-light scanning interferometer for absolute nano-scale gap thickness measurement
Xu, Zhiguang, Shilpiekandula, Vijay, Youcef-toumi, Kamal, Yoon, Soon FattVolume:
17
Year:
2009
Language:
english
Journal:
oe/17/17/oe-17-17-15104.pdf
DOI:
10.1364/OE.17.015104
File:
PDF, 890 KB
english, 2009