Large-area and high-resolution distortion measurement based...

Optics Express 2009 Vol. 17; Iss. 21

Large-area and high-resolution distortion measurement based on moiré fringe method for hot embossing process

Xu, Zhiguang, Taylor, Hayden K., Boning, Duane S., Yoon, Soon Fatt, Youcef-Toumi, Kamal
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Volume:
17
Year:
2009
Language:
english
Journal:
oe/17/21/oe-17-21-18394.pdf
DOI:
10.1364/OE.17.018394
File:
PDF, 1.49 MB
english, 2009
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