Monolithic integration of elliptic-symmetry diffractive...

Optics Express 2009 Vol. 17; Iss. 23

Monolithic integration of elliptic-symmetry diffractive optical element on silicon-based 45° micro-reflector

Lan, Hsiao-Chin, Hsiao, Hsu-Liang, Chang, Chia-Chi, Hsu, Chih-Hung, Wang, Chih-Ming, Wu, Mount-Learn
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Volume:
17
Year:
2009
Language:
english
Journal:
oe/17/23/oe-17-23-20938.pdf
DOI:
10.1364/OE.17.020938
File:
PDF, 691 KB
english, 2009
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