![](/img/cover-not-exists.png)
Near-field ellipsometry for thin film characterization
Liu, Zhuang, Zhang, Ying, Kok, Shaw Wei, Ng, Boon Ping, Soh, Yeng ChaiVolume:
18
Year:
2010
Language:
english
Journal:
oe/18/4/oe-18-4-3298.pdf
DOI:
10.1364/OE.18.003298
File:
PDF, 394 KB
english, 2010