Damage threshold measurements on EUV optics using focused...

Optics Express 2010 Vol. 18; Iss. 5

Damage threshold measurements on EUV optics using focused radiation from a table-top laser produced plasma source

Barkusky, Frank, Bayer, Armin, Döring, Stefan, Grossmann, Peter, Mann, Klaus
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Volume:
18
Year:
2010
Language:
english
Journal:
oe/18/5/oe-18-5-4346.pdf
DOI:
10.1364/OE.18.004346
File:
PDF, 313 KB
english, 2010
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