Properties of broadband depth-graded multilayer mirrors for EUV optical systems
Yakshin, A. E., Kozhevnikov, I. V., Zoethout, E., Louis, E., Bijkerk, F.Volume:
18
Year:
2010
Language:
english
Journal:
oe/18/7/oe-18-7-6957.pdf
DOI:
10.1364/OE.18.006957
File:
PDF, 743 KB
english, 2010