Properties of broadband depth-graded multilayer mirrors for...

Properties of broadband depth-graded multilayer mirrors for EUV optical systems

Yakshin, A. E., Kozhevnikov, I. V., Zoethout, E., Louis, E., Bijkerk, F.
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Volume:
18
Year:
2010
Language:
english
Journal:
oe/18/7/oe-18-7-6957.pdf
DOI:
10.1364/OE.18.006957
File:
PDF, 743 KB
english, 2010
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