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Reflectometer-based metrology for high-aspect ratio via measurement
Ku, Yi-Sha, Yang, Fu ShiangVolume:
18
Year:
2010
Language:
english
Journal:
oe/18/7/oe-18-7-7269.pdf
DOI:
10.1364/OE.18.007269
File:
PDF, 4.95 MB
english, 2010