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Determining mean thickness of the oxide layer by mapping the surface of a silicon sphere
Zhang, Jitao, Li, Yan, Wu, Xuejian, Luo, Zhiyong, Wei, HaoyunVolume:
18
Year:
2010
Language:
english
Journal:
oe/18/7/oe-18-7-7331.pdf
DOI:
10.1364/OE.18.007331
File:
PDF, 1.05 MB
english, 2010