Fabrication of micro DOE using micro tools shaped with...

Optics Express 2010 Vol. 18; Iss. 8

Fabrication of micro DOE using micro tools shaped with focused ion beam

Xu, Z. W., Fang, F. Z., Zhang, S. J., Zhang, X. D., Hu, X. T., Fu, Y. Q., Li, L.
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Volume:
18
Year:
2010
Language:
english
Journal:
oe/18/8/oe-18-8-8025.pdf
DOI:
10.1364/OE.18.008025
File:
PDF, 1.90 MB
english, 2010
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