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A practical nanofabrication method: surface plasmon polaritons interference lithography based on backside-exposure technique
He, Mingyang, Zhang, Zhiyou, Shi, Sha, Du, Jinglei, Li, Xupeng, Li, Shuhong, Ma, WenyingVolume:
18
Year:
2010
Language:
english
Journal:
oe/18/15/oe-18-15-15975.pdf
DOI:
10.1364/OE.18.015975
File:
PDF, 906 KB
english, 2010