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Diffractive phase-shift lithography photomask operating in proximity printing mode
Cirino, Giuseppe A., Mansano, Ronaldo D., Verdonck, Patrick, Cescato, Lucila, Neto, Luiz G.Volume:
18
Year:
2010
Language:
english
Journal:
oe/18/16/oe-18-16-16387.pdf
DOI:
10.1364/OE.18.016387
File:
PDF, 1.85 MB
english, 2010