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Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect
Stuerzebecher, Lorenz, Harzendorf, Torsten, Vogler, Uwe, Zeitner, Uwe D., Voelkel, ReinhardVolume:
18
Year:
2010
Language:
english
Journal:
oe/18/19/oe-18-19-19485.pdf
DOI:
10.1364/OE.18.019485
File:
PDF, 1.49 MB
english, 2010