Structural properties of Al/Mo/SiC multilayers with high...

Structural properties of Al/Mo/SiC multilayers with high reflectivity for extreme ultraviolet light

Hu, Min-Hui, Le Guen, Karine, André, Jean-Michel, Jonnard, Philippe, Meltchakov, Evgueni, Delmotte, Franck, Galtayries, Anouk
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Volume:
18
Year:
2010
Language:
english
Journal:
oe/18/19/oe-18-19-20019.pdf
DOI:
10.1364/OE.18.020019
File:
PDF, 1.17 MB
english, 2010
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