Transfer of micro and nano-photonic silicon nanomembrane...

Transfer of micro and nano-photonic silicon nanomembrane waveguide devices on flexible substrates

Ghaffari, Afshin, Hosseini, Amir, Xu, Xiaochuan, Kwong, David, Subbaraman, Harish, Chen, Ray T.
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Volume:
18
Year:
2010
Language:
english
Journal:
oe/18/19/oe-18-19-20086.pdf
DOI:
10.1364/OE.18.020086
File:
PDF, 977 KB
english, 2010
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